Patterning with alternative lithography (di-block copolymer, EUV resist…)
Plasma etching and stripping for III-V materials (HEMT, CMOS, ...)
Plasma etching and stripping for memories (MRAM, OXRAM, PCRAM, CBRAM...)
New etch concept (Atomic Layer Etching, Self-limiting etching)
Plasma for alternative technologies (biotechnology, PV….)